AURIGA 60^®
Information Beyond Resolution

The flexibility that is already the hallmark of the AURIGA line is propelled to a new, unsurpassed level by the AURIGA^® 60:

• 6-inch stage vacuum chamber – capable of handling 8-inch wafers
• 23 free accessory ports leave nothing to be desired
• dedicated cryogenic transfer port for easy examination of deep-frozen specimen
• safeguarded upgrade path from a stand-alone SEM to a fully equipped FIB-SEM allowing to reflect on the individual needs and budgetary capabilities

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