Product Features of IMPRIO™ Lithography Systems
UV-Curable, Step and Repeat Imprinting Capability
Affordable Lithography
SUB-50 Nanometer Resolution with Superior Critical Dimension Control
Multi-Layer and 3-Dimensional Imprinting
Application Manager™ Software for Easy Tool Operation
SUB-Micron Overlay Alignment Capability for the IMPRIO™ 55 and 100