High Resolution at Low Voltages and Low Currents

High resolution is not limited to high energies anymore. With the unique GEMINI® II column high resolution images are possible even at low energies and/or low beam currents. The most detailed surface information with a complete prevention of charging and beam damage becomes now accessible. Choose versatility. Choose MERLIN®.

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High Resolution Imaging at Low Acceleration Voltages and Low Beam Currents with Merlin®
(pdf, 3.45 MB)