| Resolution | 1.3 nm @ 15 kV
2.1 nm @ 1 kV
5.0 nm @ 0.2 kV |
| Magnification | 12 - 900,000x |
| Emitter | Thermal field emission type |
| Acceleration Voltage | 0.02 - 30 kV |
| Probe Current | 4 pA - 10 nA (40 nA optional) |
| Standard Detectors | High efficiency In-lens detector
Everhart-Thornley Secondary Electron Detector |
| Chamber | 330 mm (Ø) x 270 mm (h)
2 EDS ports 35° TOA
CCD-camera with IR illumination |
| 5-Axes Motorised Eucentric Specimen Stage | X = 130 mm
Y = 130 mm
Z = 50 mm
T = -3 - 70°
R = 360° (continuous) |
| Image Processing | Resolution: Up to 3072 x 2304 pixel
Noise reduction: Seven integration and averaging modes |
| Image Display | Single 19” TFT Monitor with SEM image displayed at 1024 x 768 pixels |
| Image Hardcopy | Choice of Windows® driven laser, inkjet or video print media |
| System Control | SmartSEM™* with Windows® XP, operated by mouse, keyboard and joystick with optional control panel |