 | | The ULTRA series, based on the SUPRA™ FESEM series comprises a high efficiency, high resolution In-column EsB detector which enables ultra high resolution BSE imaging.
The ULTRA FESEM integrates the latest developments in the GEMINI® technology utilising a newly developed Energy and angle selective Backscattered detector (EsB). The ULTRA features the GEMINI® In-lens SE detector for clear topographic imaging and the EsB detector for compositional contrast imaging enabling simultaneous real time imaging and mixing of both signals.
The EsB detector incorporates a filtering grid which enables high resolution BSE imaging revealing previously unseen image details. | | ULTRA 55
ULTRA plus
ULTRA 60
Advantages of ULTRA
Benefits
EsB detection principle
EsB filtering technology
Application examples
ULTRA Video Tour
Contact
Carl Zeiss NTS GmbH, Oberkochen
Phone: +49 7364 20 4488
Fax: +49 7364 20 4343
Inquiry
info-nts@smt.zeiss.com
www.smt.zeiss.com/nts |