The GEMINI® column technology is now capable of resolving structures on a resolution level comparable with „In-lens“ instruments; the same column in high current also delivers probe currents to meet any analytical application from BSE, CL, EDS, EBSD and WDS without sacrificing resolution capabilities. The GEMINI® column used with the SUPRA™ range of FESEMs now benefits from the 3rd generation of In-lens detectors with increased signal to noise ratio, improved dynamic range and no aging effect on the detection material. Imaging of real surface details is possible with accelerating voltage as low as 100 Volt with high resolution still maintained (4 nm @ 0.1 kV). Imaging details at the base of deep or high aspect ratio holes is a simple task for the new high efficiency detector.
Another unique benefit of the GEMINI® technology is the extremely low magnetic field outside the objective lens compared the single pole FESEM electron optics. The GEMINI® column enables ultra high resolution distortion free imaging of magnetic specimens. |