| | SUPRATM 55 Versatile High Performance FESEM
The SUPRATM 55 is a superior high end FESEM based on the 3rd generation GEMINI® column. A unique pendulum damping system combined with a stable 5 axis motorised stage, in a solid new chamber provides ultra high resolution imaging over the complete voltage range.
This system enables the user to achieve unique results also in a rough environment. With the ability to handle large awkwardly shaped specimens it is a fully analytical FESEM with up to 20nA probe current for applications in materials development, semiconductor technology, life science and all fields of nanotechnology applications.
- Best in class high resolution at low kV: 1.7nm @ 1kV, 4nm @ 0.1kV
- High efficiency In-lens detector for exceptionally clear imaging
- Ultra stable high current mode (up to 20 nA) for X-ray analysis and EBSD applications; better than 0.2%/h
- Short analytical working distance of 8.5 mm for simultaneous high resolution imaging and X-ray analysis
- Build in AsB detecor as option, for unique backscattered electron imaging
- Easy operation through Windows® based SmartSEMTM control software
SUPRATM55 - combines ultra high resolution and analytical capabilities into one single FESEM
Contact
Carl Zeiss NTS GmbH, Oberkochen
Phone: +49 7364 20 4488
Fax: +49 7364 20 4343
Inquiry
info-nts@smt.zeiss.com
http://www.smt.zeiss.com/nts |