| | FESEM with superb imaging on large samples
The ULTRA 60 with the new Energy and angle selective Backscattered electron (EsB) detector integrated in the GEMINI® column is the instrument of choice for clear and precise imaging on large delicate specimens or uncoated wafers. The ULTRA 60 enables clear topographic imaging with the high efficiency In-lens SE detector. Simultaneous backscattered electron imaging is achieved with the new EsB detector. BSE imaging with its compositional contrast is less sensitive for charging and edge contrast, hence ideal for metrology applications. The superb 6“ fully eucentric stage allows tilting with minimal image shift giving quicker results with less adjustments. The refined stage control for the ULTRA 60 includes magnification compensated stage movements for ease of use and fast location of predefined features.
Key Features
- Ultra high resolution imaging at low kV
- High efficiency EsB detector for compositional contrast
- High efficiency In-lens SE detector for high contrast surface imaging
- BSE imaging at very short working distances: 1mm WD
- Ideal for feature measurements and metrology
- Extra large 6-axes motorised fully eucentric stage with fine stage control
- Large sample throughput with integrated 8“ airlock
- Easy operation through Windows® XP based SmartSEM™ control software
 Essential Specification
Contact
Carl Zeiss NTS GmbH, Oberkochen
Phone: +49 7364 20 4488
Fax: +49 7364 20 4343
 Inquiry
 info-nts@smt.zeiss.com
 www.smt.zeiss.com/nts |