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The unique GEMINI® lens design has many advantages over classical lens designs.
The most important feature is the decreasing aberrations with decreasing beam energy. Therefore it delivers superb resolution down to 20V and at 30kV its resolving power is unsurpassed.
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GEMINI® objective lens |
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The high-angled GEMINI® objective lens body allows 50° tilt of large specimens (e.g. 6" wafers) at a working distance as low as 6 mm. The analytical working distance for EDS analysis with a take-off angle of 35° is only 8.5 mm - suitable for high resolution imaging. The GEMINI® objective lens consists of a high performance magnetic lens with an inserted electrostatic lens. The GEMINI® concept has overcome the problem with classical objective lens designs which immerses the specimen in the magnetic field prohibiting imaging of magnetic samples. The GEMINI® magnetic lens is shaped to minimise the magnetic field at the specimen.
Therefore high resolution imaging of dia-, para-, or ferromagnetic samples is possible with very short working distances.
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The extremely low magnetic field of the GEMINI® column, compared to single pole FESEM instruments, allows distortion-free high resolution imaging of magnetic materials at short working distances. |
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The GEMINI® objective lens provides outstanding resolution and image quality, especially at low beam voltages, without any compromise in operational convenience.
The magnetic/electrostatic lens combination is equivalent to an
optical lens triplet which increases the incident beam aperture
angle at the specimen and hence improves resolution. The increase of the optimum beam aperture angle also provides a larger electron probe current and hence generates a superior signal to noise ratio of the image. The lens control system with integrated condenser control will always select the optimum beam aperture for any combination of working distance and / or selected energy. Consequently the microscope delivers excellent image contrast even at the resolution limit. | |
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SEM Microscopes
CrossBeam® Workstations (FIB-SEM) |