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| Advantages of ULTRA FESEM |
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Precise and clear imaging
- Ultra-high resolution BSE imaging
- Less sensitive to charging effects
- Compositional contrast imaging
- Not sensitive to edge contrast
- Ideal for precise boundary, feature and particle measurements
High Efficiency EsB detector
- High efficiency direct detection principle for BSE and SE
- No inefficient conversion plates required
- Utilises the GEMINI® electron optics for separation of BSE
and SE
- BSE imaging at low working distance – 1mm
- Sensitive for ultra-low voltage imaging – 20 V
Integrated filtering technology
- Enables true BSE imaging
- Allows energy selection of BSE
- Suppresses charging effects of non conducting specimens
Ease of operation
- Fully integrated detector, no need for adjustment
- Simultaneous operation with the In-lens SE detector
- Real time imaging and mixing of BSE and SE signal
- Easy selection of filtering voltage
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