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| Probe Current Monitor for X-ray Microanalysis and Lithography Applications |
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- Standards based microanalysis using wavelength dispersive X-ray spectroscopy (WDS) is frequently used in geology and metallurgy to provide accurate, and sensitive, quantitative analysis. The x-ray intensities from the specimen are compared with x-ray intensities from standards. It is critical that the probe current is measured accurately at the time of both measurements.
- In electron beam lithography the dose of electrons used to expose the specimen is an important parameter. A stage mounted Faraday cup is disadvantageous as the stage has to be moved and the Faraday cup compromises the size of wafer that can be handeled. The Probe Current Monitor avoids these restrictions.
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SmartSEM UI Panel |
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The new Probe Current Monitor (PCM) is a motorized, in column, Faraday cup that enables the probe current to be determined and without moving the stage. The PCM can be controlled by accessory suppliers using the Carl Zeiss remote control interface.
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