| | The new ULTRA plus is the essential and consequent further development of the ULTRA55. It combines the unique detection capabilities of the ULTRA55 plus a revolutionary charge compensation (CC) system for imaging of most critical non conducting samples. This makes it an ULTRA high end FE-SEM for all aplications in Material Science, Life Science and the Semiconductor world. The fully automatically charge compensator can be used in conjunction with all integrated detectors known from the ULTRA55: EsB, Inlens, AsB and chamber mounted Everhart Thornley detector. With the unique capability of both Inlens detectors also in the charge compensation mode the ULTRA plus is a dedicated nanoanalytic tool for high resolution imaging and material analysis.
Precise and clear imaging
- Ultra high resolution BSE imaging
- Sensitive for ultra low voltage imaging down to 20V
- Insensitive to charging effects
- Complete detection system with ESB, Inlens,AsB and Everhart Thornley detector
Ease of use
- Fully integrated detectors without adjustment
- Charge compensation by one mouse click
- Fast image acquisition in CC mode
- Integrated super large scan field mode with Fisheye setup
- Utilises the Gemini electron optics for seperation of BSE and SE in real time
Charge Compensation
- Local dry nitrogen gas jet
- Fully integrated system control
- Fast switching between high vacuum and charge compensation
- Clear material contrast
- All standard detectors can be used in charge compensation mode
Contact
 Carl Zeiss NTS GmbH, Oberkochen
Phone: +49 7364 20 4488
Fax: +49 7364 20 4343
 Inquiry
 info-nts@smt.zeiss.com
 www.smt.zeiss.com/nts |