KV_MERLIN MERLIN® - Field Emission Scanning Electron Microscope
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MERLIN Introduction
GEMINI II Column
Charge Compensation including in situ cleaning
3 Dimensional Surface Modelling
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June 1st, 2010:
Press Release MERLIN®
July 1st, 2009:
Press Release MERLIN®

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Charge Compensation with In-situ Cleaning

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MERLIN®
Analytical Power for the Sub-Nanometer World
  • Nano Analytics
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  • Ease of Use
  • Future Assured
The MERLIN® FE-SEM overcomes the conflict between image resolution and analytical capability. The core of MERLIN® is the enhanced GEMINI II column which, with its double condenser system, achieves an image resolution of 0.8 nanometers. A sample current of up to 300 nanoamperes is available for analytical purposes such as energy and wavelength dispersive X-ray spectroscopy (EDS and WDS), diffraction analysis of backscattered electrons (EBSD) or the generation of cathodoluminescence.

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