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LIBRA® 200 Cs-TEM and LIBRA® 200 Cs-STEM
Corrected View of the Sub-Ångstrom World |
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| | Combining the well established LIBRA® 200 platform with state-of-the-art aberration correctors provides powerful new atomic-scale imaging and analytical capabilities.
Dramatically improved resolution and chemical sensitivity now give access to developing next-generation applications in fields such as materials science, soft matter, life sciences, semiconductor and nanotechnology.
The LIBRA® 200 Cs-TEM improves the point resolution of the microscope up to its information limit by incorporating an imaging corrector for the objective lens:
Point resolution < 80pm @ 200 kV
Operation between 80 kV and 200 kV
Atomic resolution at 80 kV
Delocalisation free imaging
The LIBRA® 200 Cs-STEM, with an aberration corrector for the illumination system enables sub-Ångstrom resolution in STEM mode:
STEM resolution < 0.1 nm @ 200 kV
Probe current ten times higher than the standard (uncorrected) system, leading to improved signal-to-noise and significantly enhanced chemical sensitivity
Superior energy resolution without sacrificing probe size (resolution), by combining with a monochromator
Both instruments may be equipped with a dispersionfree electrostatic monochromator providing an energy
resolution < 0.15 eV and a further improvement of the information limit of the instrument. |
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2009-08-19: Corrected TEM
LIBRA® 200 CS-TEM/STEM from Carl Zeiss
Record Breaking UHR TEM
Zeiss’s record breaking ultra high resolution TEM
Newsletter
New record milestone in sub-Angstrom e-beam imaging
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