 | SEM | FIB |
| Resolution | Gemini Column
1.1 nm @ 20 kV
2.5 nm @ 1 kV | SIINT 100 mm zeta FIB column
4nm @ 30kV |
| Magnification | 30x - 900kx | 475x - 500kx |
| Probe Current | 4 pA - 20 nA | < 0.1 pA - 45 nA |
Acceleration Voltage
low voltage option | 0.1 - 30 kV | 5 - 30 kV
1 - 5 kV (option) |
| Emitter | Thermal field emission type | Ga liquid metal ion source |
| Gas Injection System | Four channel single injector GIS system for
- up to two different solid state precursors and
- up to four different gaseous or liquid precursors on individually mass flow controlled gas lines.
Wide range of precursor options including W, Pt, C, and silicon oxide insulator deposition as well as precursors for enhanced or selective materials etching. |
| Stage | 6-axis super eucentric, all motorized stage.
| Motion range | X, Y = 100mm
Z = 43mm
Z’ = 10mm
Tilt = -10° to 60°
Rotation = 360° continuous |
|
| Detectors |
| In-column: | EsB detector with filtering grid for BSE detection,filtering grid voltage 0 to - 1500V. |
| In-lens: | High efficiency annular type SE detector |
| Chamber: | Everhart Thornley type SE detector 2 chamber IR-CCD cameras 4Q BSE detector (optional) GEMINI® multimode BF/DF STEM detector (optional) |
|
| Chamber |
| Size: | 330 mm (D) x 266 mm (H) |
| Load lock: | 100 mm manual general purpose load lock with two specimen exchange positions.
7 additionally available ports for various options including STEM, 4QBSD, EBSD, EDX detectors, and sample manipulation systems. |
|
| Image Acquisition and Image Display |
| Resolution: | from 512x 384 to 3072 x2304 pixel |
| Processing: | pixel averaging, frame/line averaging and integration |
|
| System Control | Integrated SmartSEMTM user interface based on WindowsXP® operating system, controlled by mouse, keyboard, joystick and control panel. |
| Space requirement | Recommended footprint: 2.30 m x 2.70 m
Recommended working area: 2.70 m x 3.80 m |