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| GEMINI® - SE Signal Detection |
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The GEMINI® objective lens concept allows optimum detection of all signals generated at the specimen.
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Principle of secondary electron signal detection with the high efficiency
In-lens detector and the lateral detector in the sample chamber. |
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Excellent efficiency detection of the secondary electron (SE) signal is another benefit of the GEMINI® lens concept. The low energy, secondary electrons generated at the impact point of the primary electron beam are intercepted by the weak electrical field at the sample surface. They are then accelerated to a high energy by the field of the electrostatic lens and focused on the annular In-lens detector inside the beam booster located above the objective lens.
The GEMINI® column now benefits from the 3rd generation of In-lens detectors with increased signal to noise ratio, improved dynamic range and no aging effect on the detection material. While the In-lens detector provides the best high resolution information, a lateral SE detector in the specimen chamber provides optimum topographical information. Signals from both detectors may be mixed to deliver optimum image quality.
For the variable pressure (VP) instruments ZEISS has developed the unique VPSE detector to enable SE imaging at pressures in the 2 to 133 Pa range combined with the standard Everhart-Thornley detector for imaging in high vacuum (HV) mode. | |
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SEM Microscopes
CrossBeam® Workstations (FIB-SEM) |