 | | The NEON® 60 platform is the system of choice for bulky samples featuring a large chamber with 6'' stage and integrated 8'' airlock. The combination with the sophisticated Canion FIB column provides an integrated workstation, that opens up new dimensions for nanotechnology, semiconductor and material analysis applications. The integral multi channel gas injection system adds material deposition and selective or enhanced etching facilities to the NEON® 60 CrossBeam® capabilities making it the ultimate analysis and inspection tool.
The refined 6-axes stage is a perfect complement to the high resolution capabilities of the NEON® 60 CrossBeam®. The stability of this super eucentric stage ensures perfect results on cutting edge applications such as device modifications, cross sections or TEM sample preparations.
Key Features
- Ultra high resolution FESEM with unique GEMINI® column
- Large 210 mm x 50 mm integrated airlock for fast specimen transfer
- Highly reliable pumping system, compatible with the toughest conditions
- High performance CANION FIB column as upgrade
- Multi-channel gas injection system with up to five gas lines for material deposition and enhanced or selective etching as upgrade
- CrossBeam® operation: high resolution live imaging during milling and polishing
- Endpoint detection for automated milling
- Automated TEM preparation software package
- Super eucentric, fully motorised, 6-axes stage with ultra fine controls and unsurpassed stability
- Image archiving, networking and hardcopy solutions from the integral Windows® operating system
 Essential Specification - NEON® Series
Contact
 Carl Zeiss NTS GmbH, Oberkochen
Phone: +49 7364 20 4488
Fax: +49 7364 20 4343
 Inquiry
 info-nts@smt.zeiss.com
 www.smt.zeiss.com/nts |