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| Milestones of Electron Microscopy at Carl Zeiss |
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The history of electron microscopy at Carl Zeiss started with the pioneers in this field: Carl Zeiss and Cambridge Instruments. Nowadays, the company’s extensive know-how, accumulated over six decades, includes e-beam, ion-beam and transmission electron technology. See below the milestones of Electron Microscopy at Carl Zeiss in the history:
| Carl Zeiss | Cambridge Instruments |
1846 Carl Zeiss Company founded by Carl Zeiss
1876 Ernst Abbe predicted future microscopes overcoming the light optical resolution limits
1931 Beginning of TEM development by AEG
1942 Cooperation for electron microscopy started by AEG and Carl Zeiss
1947 Commercial TEM launched EM7 with electrostatic lenses
1954 Change of ownership to 100% Carl Zeiss in Oberkochen
1961 TEM EM 9 with electromagnetic lenses
1975 Cooperation with SEMCO for development of SEMs (NovaSCAN)
1984 First commercially available EFTEM (EM902) with Castaing-Henry Filter
1985 First digital SEM worldwide, DSM 950 launched 100% ZEISS development
1990 TEM EM910 with Koehler illumination launched
1993 GEMINI FE-SEM launched
1998 First 200kV EFTEM launched (EM922) | 1
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1881 Cambridge Instruments founded by Horatio Darwin
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1962 Beginning of SEM development at Cambridge Instruments
1965 SEM Stereoscan Mk1, first commercially available SEM worldwide
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1990 Leica formed through merger of Cambridge Instruments and Wild Leitz |
1995 The activities of Carl Zeiss and Leica in the Electron Microscopy Technology are bundled in the 50/50 joint venture LEO Electron Microscopy
2001 Variable Pressure FE-SEM launched
2001 Change of ownership: Carl Zeiss SMT acquires 100% of LEO Electron Microscopy
2002 CrossBeam launched; combined FIB-SEM system
2003 200kV FE EFTEM launched with Koehler Illumination
2003 EFTEM with In-Column corrected Omega energy filter
2004 Rebranding: LEO Electron Microscopy becomes Carl Zeiss Nano Technology Systems GmbH (in short: NTS) as a company of Carl Zeiss SMT
2004 CrossBeam EsB launched with dual In-lens electron detectors (SE + BSE)
2005 New record milestone in TEM resolution: < 0.08 nm 200 kV TEM with Cs corrector and monochromator.
2006 Strategic Alliance with SIINT resulting in XVision and NVision products
2007 Acquisition of ALIS technology
2007 He-Ion Microscope ORION based on ALIS Technology
2007 FE-SEM with unique charge compensation called ULTRA PLUS
2008 advanced analytical FE-SEM ΣIGMA
2009 modular product systems AURIGAŽ and MERLINŽ
2009 corrected TEM which enables sub-angstrom resolution in HR STEM and HR TEM mode LIBRAŽ 200 Cs-TEM/STEM
2011 Carl Zeiss NTS GmbH and Carl Zeiss MicroImaging GmbH jointly form the new Carl Zeiss Microscopy business group. |
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The History of Carl Zeiss |