 | SEM | FIB |
| Resolution | 3 nm @ 5 kV | 4 nm @ 30 kV |
| Probe Current | 4 pA - 20 nA | 0.15 pA - 45 nA |
| Acceleration Voltage | 1 kV - 30 kV | 1 kV - 30 kV |
Ion Source
Electron Source | Ga liquid metal ion source
Thermal field emission type |
| Observation Field | 0.5 x 0.5 um to 2 mm Ø |
| Operating Pressure |
| High vacuum main chamger: | 8x10-5 Pa or lower |
| Ion source chamber: | 1x10-5 Pa or lower |
| Electron source chamber: | 1x10-6 Pa or lower |
|
| Specimen Chamber |
| Integrated ports for: | FIB, Detector (SED, EDS), SEM, Light, Gas Injector, CCD Camera, Ar Ion Optics |
|
| Specimen Stage | 5-axes fully eucentric, all motorised
| X = 327mm
Y = 327mm
T = -5 - 60°
R = 360° continuous |
|
| Image Display | 19" TFT monitor (2 sets)
image displayed at 1280 x1024pixel |
| Image Memory Medium | CD-R/RW |
| System Control | Windows®XP based SIINT user software operated by mouse and keyboard |