 | | The combination of the high efficiency In-lens SE detector for clear high contrast imaging of surface details together with the newly developed EsB detector for compositional contrast, makes the ULTRA one of the most versatile ultra high resolution FESEMs currently available. Applications as diverse as uncoated wafers, semiconductor cross sections, ceramics, plastics, nanoparticles and immunogold labelling all benefit from the combination of the EsB and the In-lens SE detector.
Simultaneous ultra high resolution imaging and video processing of nano-scale surface details are now combined with compositional information which enables imaging of particle distributions, clear boundary imaging and precise feature measurement. The higher energy backscattered electrons, which are detected by the EsB detector are less sensitive to charging on non-conducting
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