| Resolution | 1.0 nm @ 15 kV
1.7 nm @ 1 kV
4.0 nm @ 0.1kV |
| Magnification | 12 - 900,000x in SE mode
100 - 900,000x with EsB detector |
| Emitter | Thermal field emission type,
stability >0.2%/h |
| Acceleration Voltage | 0.02 - 30 kV |
| Probe Current | 4 pA - 10 nA (40 nA optional) |
| Standard Detectors | EsB detector with filtering grid
Filtering grid voltage 0 - 1500 V
High efficiency In-lens SE detector
Everhart-Thornley Secondary Electron Detector |
| Chamber | 330 mm (Ø) x 270 mm (h)
2 EDS ports 35° TOA
CCD-camera with IR illumination |
| 5-Axes Motorised Eucentric Specimen Stage | X = 130 mm
Y = 130 mm
Z = 50 mm
T = -3 - 70°
R = 360° (continuous) |
| Image Processing | Resolution: Up to 3072 x 2304 pixel
Noise reduction: Seven integration and averaging modes |
| Image Display | Single flicker-free 19" XVGA monitor with SEM image displayed at 1024 x 768 pixel
TFT optionally available |
| Image Hardcopy | Choice of Windows® driven laser, inkjet or video print media |
| System Control | SmartSEM™* with Windows® XP, operated by mouse, keyboard and joystick with optional control panel |