| | The NEON® 40EsB platform features the highly acclaimed benefit of a fully integrated energy and angle selective backscattered electron detector for advanced compositional information and ultra-high BSE imaging at very short working distances. The EsB detector is less sensitive for edge contrast and charging effects which enables precise feature imaging and reliable metrology. Equipped with the sophisticated Canion FIB the system allows fast and precise cross sectioning and TEM preparation. Delivering superb materials contrast and crystallographic imaging, the NEON® 40EsB is the instrument of choice for all three dimensional analytical applications.
Key Features
- Ultra high resolution FESEM with unique GEMINI® column
- Ultra high efficiency EsB detector for compositional information
- Ideal metrology tool for precise feature definition
- High performance CANION FIB column as upgrade
- Multi-channel gas injection system for material deposition and enhanced or selective etching as upgrade
- CrossBeam operation: ultra high resolution live SE/BSE imaging during FIB milling and polishing
- Automated TEM preparation software package
- Intuitive operation with Windows® based SmartSEM® GUI
 Essential Specification - NEON® Series
Contact
 Carl Zeiss NTS GmbH, Oberkochen
Phone: +49 7364 20 4488
Fax: +49 7364 20 4343
 Inquiry
 info-nts@smt.zeiss.com
 http://www.smt.zeiss.com/nts |