auriga_KV CrossBeam® Workstations
The AURIGA® Benefits
Unique Imaging
  • Imaging of non-conductive specimens using all standard detectors with local charge compensation
  • Simultaneous detection of topographical and compositional information with a unique detector scheme including EsB-technology
  • Investigation of magnetic samples with GEMINI® objective lens design

Advanced Analytics
  • Analysis of non-conducting materials with local charge compensation
  • Multi-purpose chamber with 15 accessory ports
  • Optimum chamber geometry for the simultaneous integration of EDS, EBSD, STEM, WDS, SIMS etc.

Precise Processing
  • Innovative FIB technology with best-in-class resolution (< 2.5 nm)
  • High resolution live FE-SEM monitoring of the entire preparation process
  • Advanced gas processing technology for ion and e-beam assisted etching and deposition

Future Assured
  • Expandable platform concept based on GEMINI® FE-SEM technology
  • Modular building blocks for value-adding functionality
More Information
back


Further Information