 | | Ultra high resolution FESEM for SE and BSE
The ULTRA 55 represents the latest development in GEMINI® technology. Based on the SUPRA™ 55, the ULTRA 55 now comprises a fully integrated Energy and angle selective Backscattered electron (EsB) detector. The ULTRA 55 offers ultra high resolution for both SE to image surface information and BSE to present compositional information. The new EsB detector features an integrated filtering grid to enhance image quality and requires no additional adjustments. The EsB detector is less sensitive for edge contrast and charging effects which enables precise imaging and measurement of boundaries, particles, and features.
Combined with the large multi-port analytical chamber, the fully motorised 5-axes motorised eucentric stage and the GEMINI® high current mode the ULTRA 55 also offers superb analytical capabilities.
Key Features
- Ultra high resolution imaging at low kV
- Ideal for precise boundary, feature, and particle measurements
- High efficiency EsB detector for compositional information
- High efficiency In-lens SE detector for high contrast surface imaging
- BSE imaging at very short working distances - 1mm WD
- Ultra stable high current mode for X-ray analysis and EBSD applications - 20 nA / 0.2%/h
- Large five axes motorised eucentric stage
- Easy operation through Windows® XP based SmartSEM™ control software
 Essential Specification
Contact
Carl Zeiss NTS GmbH, Oberkochen
Phone: +49 7364 20 4488
Fax: +49 7364 20 4343
 Inquiry
 info-nts@smt.zeiss.com
 http://www.smt.zeiss.com/nts |