| | Versatile High Throughput FESEM
The SUPRA™ 40 is a general purpose high resolution FESEM based on the 3rd generation GEMINI® column. Excellent imaging properties combined with analytical capabilities makes this workhorse suitable for a wide range of applications such as materials development, failure analysis, process control, cryo, nanotechnology and analytical applications. The large specimen chamber for the integration of optional detectors and accessories enables the user to configure the SUPRA™ 40 for specific applications without sacrificing productivity or efficiency.
Key Features
- Superb resolution and image quality at low operating voltages
- Wide operating voltage range with minimal adjustments required
- Short working distance of 8.5 mm for simultaneous high resolution imaging and X-ray analysis
- High probe current (up to 20 nA) and high stability better than 0.2 %/h for analytical applications
- High efficiency In-lens detector for clear topographic imaging in high vacuum mode
- Large 5-axes motorised eucentric stage
- Easy operation through Windows® based SmartSEM™ control software
 Essential Specification
Contact
Carl Zeiss NTS GmbH, Oberkochen
Phone: +49 7364 20 4488
Fax: +49 7364 20 4343
 Inquiry
 info-nts@smt.zeiss.com
 www.smt.zeiss.com/nts |