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SUPRA™ 50 with WDS spectrometer installed
Chamber view of SUPRA™ 50 showing EDS, WDS and BSE detectors for simultaneous imaging and analysis
| | The SUPRA™ series of field emission SEMs all combine ultra high resolution imaging with full analytical capabilities. The compact GEMINI® objective lens enables an analytical working distances of only 8.5 mm with a take-off angle of 35°. The short working distance together with the high take-off angle are ideal to combine high resolution imaging with full quantitative EDS analysis.
The SUPRA™ 50 and SUPRA™ 50VP are designed to meet the most demanding analytical applications. The new anode configuration combined with the high current mode lens control provides ample probe current to perform WDS analysis. The chamber design with 35° take-off angle allows simultaneous WDS and EDS analysis with SE, BSE, CL and SCM imaging.
The GEMINI® column enables WDS analysis with a high current in a small spot combined with a superb beam stability. The WDS spectrometer with high sensitivity for light elements, superior resolution (3 – 20 eV), low background and 10x higher intensity for elemental analysis offers analytical solutions beyond EDS analysis. The combination of the SUPRA™ 50 together with the WDS spectrometer opens new fields of applications for high spatial resolution X-ray analysis.
With the SUPRA™ 50VP even non conducting samples can be imaged and analysed with EDS in variable pressure mode, however WDS analysis has to be performed in high vacuum mode. |