| Resolution | 1.0 nm @ 15 kV
1.7 nm @ 1 kV
4.0 nm @ 0.1 kV
2.0 nm @ 30 kV (VP mode) |
| VP Vacuum | 2 - 133 Pa, adjustable in steps of 1 Pa |
| Magnification | 12 - 900,000x |
| Emitter | Thermal field emission type |
| Acceleration Voltage | 0.02 - 30 kV |
| Probe Current | 4 pA - 10 nA (40 nA optional) |
| Standard Detectors | High efficiency In-lens detector
Everhart-Thornley Secondary Electron Detector
VPSE Detector |
| Chamber | 520 mm (Ø) x 300 mm (h)
1 EDS port 35° TOA
Integrated 8" airlock
CCD-camera with IR illumination |
| 6-Axes Motorised Super-Eucentric Specimen Stage | X = 152 mm
Y = 152 mm
Z = 43 mm
Z. = 10 mm
T = -15 - 60°
R = 360° (continuous) |
| Image Processing | Resolution: Up to 3072 x 2304 pixel
Noise reduction: Seven integration and averaging modes |
| Image Display | Single flicker-free 19" XVGA monitor with SEM image displayed at 1024 x 768 pixel
TFT optionally available |
| Image Hardcopy | Choice of Windows® driven laser, inkjet or video print media |
| System Control | SmartSEM™* with Windows® XP, operated by mouse, keyboard and joystick with optional control panel |