To approach exact real world scanner illumination conditions the optical beam path is completely inverted and the mask is now handled "face down".
The CCD camera is in the same position as the wafer below the mask enabling scanner comparable emulation conditions. Looking onto a mask in the same way as a scanner the AIMS™ 45-193i achieves significant tighter specifications.
To guarantee best optical performance with AIMS™ measurements the visible light beam path has been separated from the DUV beam path enabling the usage of optimally adjusted optics. A new beam homogenizer is implemented in the AIMS™ 45-193i providing best uniformity results for field and pupil homogeneity.
 top |  AIMS™ 45-193i
Features & Benefits
New Beam Path
Aerial Imaging |