The complete mask repair software is embedded in a
workflow oriented Graphical User Interface (GUI). This
interface guides the repair engineer through system setup,
defect navigation, and all repair processes. A seamless
interface to all common inspection system files is offered
for mask alignment, defect navigation and characterization.
The GUI can be accommodated to differing levels of operator skills as required from individual sites.
The most powerful software feature for precise repairs is
the pattern copy function. It includes defect pattern
extraction and automatic pattern placement. Pattern copy
can be used either in its die-to-die version or in conjunction
with an optional die-to-database package.
 top |  Benefits
Principle
Software
System Setup
Technical Data
|