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| Semiconductor Metrology Systems Division |
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The Semiconductor Metrology Systems (SMS) Division of Carl Zeiss SMT occupies a leading position as a global supplier of both metrology and manufacturing equipment for the semiconductor industry. Core expertise in light and electron optics, complemented by a revolutionary femto-second laser technology form the foundation of a product portfolio comprising metrology, qualification, repair/tuning and monitoring of lithographic photomasks.
Our advanced mask solutions empower our customers in the mask making industry to develop and manufacture zero defect photomasks. A suite of metrology tools, capable of measuring in-die features allow for the manufacture and qualification of masks with the largest possible process windows for wafer printing, a characteristic which is vital for improved performance and yield.
To ensure close geographical proximity to our customers we can rely on a dense global network of local branches and representatives. Development co-operations with industry consortia as well as individual customers keep us tuned to the rapidly emerging and changing requirements of the photomask technology.
Carl Zeiss' long-term commitment to the industry paired with our outstanding technology, engineering and support capabilities make us a reliable partner for your development and manufacturing equipment needs today and in the future. |
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Locations
SMS Division operates in three strong competence centres |
Events
Tradeshows and Conferences where SMS displays their products |
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