Enabling the Nano-Age World About us
Semiconductor Metrology Systems Division
The Semiconductor Metrology Systems (SMS) Division of Carl Zeiss SMT occupies a leading position as a global supplier of both metrology and manufacturing equipment for the semiconductor industry. Core expertise in light and electron optics, complemented by a revolutionary femto-second laser technology form the foundation of a product portfolio comprising metrology, qualification, repair/tuning and monitoring of lithographic photomasks.

Our advanced mask solutions empower our customers in the mask making industry to develop and manufacture zero defect photomasks. A suite of metrology tools, capable of measuring in-die features allow for the manufacture and qualification of masks with the largest possible process windows for wafer printing, a characteristic which is vital for improved performance and yield.

To ensure close geographical proximity to our customers we can rely on a dense global network of local branches and representatives. Development co-operations with industry consortia as well as individual customers keep us tuned to the rapidly emerging and changing requirements of the photomask technology.

Carl Zeiss' long-term commitment to the industry paired with our outstanding technology, engineering and support capabilities make us a reliable partner for your development and manufacturing equipment needs today and in the future.
Locations
SMS Division operates in three strong competence centres
Events
Tradeshows and Conferences where SMS displays their products