New kind of handling
Plus systems combine the well established measurement unit AIMS™ fab with handling functionality. This now enables flexible automated mask loading from different SMIF interfaces or reticle boxes. Even masks, which are different in size and thickness, with and without pellicle, can be handled on the same system without retrofitting. A barcode reader is optionally available.
New self-contained minienvironment
Plus systems feature a self-contained minienvironment with a filter-fan-unit. Together with a specially designed airflow concept they guarantee an ISO Class 3 (Fed. standard 209E class 1) environment inside the system.
Advanced illumination systems
In particular the 248 nm plus system includes the Automatic Lamp Alignment (ALA) for fast and user-friendly lamp
exchange. By use of newly developed hard- and software, the lamp housing is able to perform the exact
alignment of the lamp position in an automated, fast and very reproducible way. No expert is required for this, anymore, and the maintenance time for lamp exchanges is drastically reduced.
New dimension of software automation
AIMS™ fab plus introduce a new level of automated software features. Additionally, a user-friendly interface provides fast access to pre-set values and guides the operator through the operation in a simplified way. Set-up times are drastically reduced. A milestone is the advanced bi-directional link to KLA-Tencor inspection systems.
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