The system is based on the robust, industry proven field emission scanning electron microscope with GEMINI electron optics, with a specific chamber, semi-automatic mask loader and a high precision laser interferometer stage. A combination of a electromagnetic and electrostatic final lens delivers ultra high resolution at low voltages, with a 3 nm spot size at 1 kV and a superior beam current of 20 nanoampere.
GEMINI principle
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The hardware is completed by a proprietary five-channel gas injection system with gas cabinet housing the reservoirs and valve control. Furthermore, a dedicated e-beam scan generator is available for repair. Finally, special care had been taken to compensate for any mask charging by a proprietary method.
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