New kind of mask handling
Plus systems combine the well established measurement unit of AIMS™ fab 193 with handling functionality. This now enables flexible automated mask loading from different SMIF interfaces or reticle boxes. Even masks, which are different in size and thickness, with and without pellicle, can be handled on the same system without retrofitting. A barcode reader is optionally available.
New dimension of software automation
AIMS™ fab 193 introduces a new level of automated software features. Additionally, a user-friendly interface provides fast access to pre-set values and guides the operator through the operation in a simplified way. Set-up times are drastically reduced. A break through is the advanced bi-directional link to the KLA-Tencor inspection systems. |  Back to previous page
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