- Workflow oriented Graphical User Interface (GUI)
- Seamless interface to most inspection system file
- Mask alignment, defect navigation and characterization
- End-point detection during etch by real-time monitoring of SE-signal
- Extensive automation schemes:
- setup and alignment (focus, stigmation, contrast, brightness)
- edge detection and critical edge placement adjustment
- drift monitoring and correction
- Die-to-die pattern copy, defect pattern extraction, automatic pattern placement
- Predefined processes for optimized deposition and etching
- Customizable repair processes and applications
|  Applications
Benefits
Principle
Software
System Setup
Technical Data |