The system is based on the industry proven field emission scanning electron systems with GEMINI® electron optics. It has a specific designed chamber, automated mask loader and a high precision laser interferometric stage.
The combination of an electromagnetic and electro-static final lens provides ultra high resolution at low voltages, 3 nm spot size at 1 kV and a maximum beam current of 20 nA.
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The proprietary computer controlled five-channel gas injection system controls precisely the precursor gas flow. In combination with a dedicated E-Beam scan generator the deposition and etching control is achieved.
A unique charge compensation technique allows to meet advanced specification for placement and reproducibility. A combination of annular SE (secondary electron) and annular EsB (energy selective backscattered electron) detectors, mounted in the GEMINI® column, are specifically optimised for the purpose of high definition imaging and ultimate precision end-pointing. As a result the MeRiT® system delivers the highest first pass yield of any repair tool known to the industry.
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