mask_inspection AIMS™
Repair Verification Software Plug-in
The AIMS™ Repair Verification Software Plug-in is a new semi-automated application that guides the AIMS users through the process of analyzing aerial image measurements of defect and repair. The Repair verification allows two applications, the Multi-Slice Analysis to evaluate single AIMS™ images with repeating structures within the field as well as the Image Compare Function to analyse a defect image together with a reference image. The Repair verification application brings more consistent results by minimizing user errors and increasing productivity.


          User Benefits
Structured ProcessOperator independent analysis results reduce mistakes
Improved ReliabilityIncreases productivity
Automated AnalysisSaves time
Integrated in AIMSTM GUIEasy to use
Result ReportProvides consistency
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Overview AIMS™ Systems