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NaWoTec GmbH was founded in December 1999 as a Spin-Off from ‘Deutsche Telekom AG’.

Its founders had worked together for many years at the T-Nova technology centre of Deutsche Telekom in Darmstadt and built up substantial know how in the field of 3-dimensional nano-structuring.

Today, NaWoTec has established itself as a nanotechnology-based R&D center with over 35 employees and maintains inhouse clean rooms, laboratories and a mechanical workshop at its facilities.

A highly skilled workforce with unique expertise in nano- lithography and numerous international patents are the basis for successful applications in electronics, nano-analytics, bio-nano physics and microoptics.

In close cooperation with Carl Zeiss SMT AG NaWoTec has developed the first e-beam based Mask Repair System MeRiT™ MG, which was successfully introduced into the market.

In 2005 NaWoTec GmbH became a wholly owned subsidary of Carl Zeiss SMS.