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| CrossBeam® Excels |
| ZEISS 1540XB CrossBeam® Wins Best Product Award | Downloads and Links | ||
| Semiconductor International’s 2004 Editors’ Choice Best Product Award goes to the innovative ZEISS 1540XB CrossBeam®. The tool enables leading-edge 3D FIB analysis of semiconductor devices, and simultaneous, ultra-high resolution e-Beam imaging. This prestigious award was bestowed upon the Nanotechnology Systems Division (formerly known as LEO Group) at Carl Zeiss SMT AG at the SEMICON Europe in Munich, Germany. | RTF Documents
english (24 KB)Further Information 
www.smt.zeiss.com/nts | ||
| Oberkochen, 28.04.2004. "The Editors' Choice Best Products program is different from traditional award competitions in that products are nominated by users, not by the companies that make or sell the product," said Pete Singer, editor in chief of Semiconductor International. "After products were nominated, we gathered additional information from other users and from the product supplier. We ultimately based our decision on the superiority of the product in a semiconductor manufacturing environment." The ZEISS 1540XB CrossBeam® combines the advantages of the ultra-high resolution, low dose Gemini Field Emission Scanning Electron Microscope (FESEM) with a high-performance, focused ion beam (FIB) system. Applications are as diverse as subsurface root cause failure analysis, high precision TEM sample preparation, nano-structuring and e-Beam lithography. The system consists of live e-Beam imaging during FIB operation, a compact, five-channel gas injection system and a large ultra-precise specimen stage, satisfying even the most demanding applications. It is a state-of-the-art combination of real-time 3D analysis, nano-scale manipulation and an imaging tool. “It is a great honor to receive this award” said Dr. Dirk Stenkamp, President of the Nano Technology Systems Division at Carl Zeiss SMT. “The commitment to bring leading edge technology to the market has been recognized by a fast-growing number of customers and has provided the basis for strong growth in our key markets. This major achievement is the result of our innovative power and the hard work of people behind our product.”  Photo: Pete Singer, editor in chief of Semiconductor International presents the Award to Dr. Dirk Stenkamp, President of the Nanotechnology Systems Division at Carl Zeiss SMT. Markus Wiederspahn Service-Center, Press Office Phone: +49 7364 20-2194 Fax: +49 7364 20-4485 E-Mail: wiederspahn@zeiss.de Number: 042/04 SE Number of Words: 339 Number of Signs: 2558 |
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