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New variable pressure ParticleSCAN solution from Carl Zeiss Downloads and Links


Enhanced solution for full-scale particle analysis of non-conductive samplesRTF Documents
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Further Information
Carl Zeiss SMT AG
The SMT Story
Carl Zeiss AG

CAMBRIDGE/UK, 18.06.2008.
Carl Zeiss SMT has launched the ParticleSCAN VP, a newly developed work-flow solution for automated full-scale high-resolution particle analysis. The newly developed system in particular allows for the analysis of non-conductive samples based on proprietary Variable Pressure technology. The system is a further development of the high vacuum ParticleSCAN particle detection and analysis system introduced in 2007 and based on Carl Zeiss' field proven mobile Scanning Electron Microscope (SEM) platform. The highly automated system has been designed for frequently repeated analysis of material samples in industrial production and research environments. It is used in process control for the detection and monitoring of ultra-fine particles. Combined with an optional X-Ray analysis tool (EDS) the system can automatically record the morphology of samples, i.e. measure, classify and record their size, shape and chemical composition. Thereby the system enables customers to perform highly efficient and automated process control, yield improvement and manufacturing capability. Provided with the dedicated SmartPI™ software, ParticleSCAN VP can be adapted to a broad spectrum of particulate analysis – from pharmaceutical powders to inclusions in metal alloys. The new Variable Pressure mode now also enables the rapid examination and analysis of non-conducting samples, including for example particles on papers or polymer filters.

Being rugged and mobile, ParticleSCAN VP can be rapidly installed with minimal environmental constraints. With a production mode interface wizard even non-skilled operators can load samples and select a preset routine for unattended analysis and reporting. The configuration mode allows the user to select and modify all of the analysis parameters through a series of set-up wizards including SEM operation, preset sample holders, image processing, EDS parameters, particle classification and report generation. Each of these components can be edited individually or selected from preset functions to build a complete analysis routine. Particle data are delivered in the form of a custom report or a flexible database containing all of the results. These data can be retrospectively re-processed with refined particle selection criteria, classifications or statistical characteristics. Particle images of specific interest can be reviewed offline, re-measured or re-located on the original sample for further analysis if required.


Markus Wiederspahn
Public Relations
Carl Zeiss SMT AG
Phone: +49 7364 20-2194
Fax: +49 7364 20-9206
E-Mail: wiederspahn@smt.zeiss.com

Number: 0112-2008-ENG SE

Number of Words: 368
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