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| First CrossBeam® EsB system with dual in-column detection capability | RTF Documents
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| Oberkochen, 13.08.2004. Carl Zeiss SMT’s Nano Technology Systems Division unveils the first CrossBeam® EsB FIB/SEM workstation with combined SE and BSE in-column detection systems at the Microscopy & Microanalysis 2004 conference in Savannah, Georgia. The new in-column EsB detector allows ultra-high resolution low-kV backscatter electron imaging, thereby adding unprecedented analytical and metrology capabilities to the market leading ZEISS CrossBeam® system technology. By introducing the new EsB CrossBeam® workstation, the ZEISS CrossBeam® family of nano-scale inspection and structuring tools is complemented by another innovative product offering. The Zeiss EsB CrossBeam® combines the advantages of the ultra-high resolution and proprietary GEMINI® Field Emission Scanning Electron Microscope (FESEM) technology with a high-performance Focussed Ion Beam (FIB) system. In particular, the new EsB CrossBeam® incorporates a revolutionary in-column BackScattered Electron (BSE) detection principle built into the unique CrossBeam® technology. “This new EsB CrossBeam® system is clear evidence of our high innovation pace” says Dr. Dirk Stenkamp, president of Carl Zeiss SMT’s Nano Technology Systems division, and continues “we are committed to continuously enhancing our product portfolio delivering cutting-edge nano technology tools”. The new in-column EsB detector offers Energy and angle Selective backscattered electron (EsB) imaging at ultra-high resolution without any further column adjustment required. This enables the operatot to achieve high contrast and material selective imaging at the utmost physical level. Applications are as diverse as materials analysis, subsurface root cause failure analysis, high precision TEM sample preparation, nano structuring and e-Beam lithography. The system extends the unique CrossBeam® operation mode with ultra-high resolution material contrast imaging during FIB operation with a precision and a success rate never seen before. It now enables precise feature analysis down to the nano-scale level. The EsB CrossBeam® comprises a compact, five-channel gas injection system and a large ultra-precise fully eucentric specimen stage, satisfying even the most demanding applications. It is the state-of-the-art combination of real-time 3D analysis, nano-scale manipulation and ultra-high resolution imaging tool.  The EsB CrossBeam® system is another example of Carl Zeiss SMT’s philosophy to serve the nano-age community with competitive, innovative and versatile ultra-high resolution imaging and analysis solutions. Markus Wiederspahn Carl Zeiss SMT AG Marketing Phone: +49 7364 20-2194 Fax: +49 7364 20-4970 E-Mail: wiederspahn@smt.zeiss.com Number: 078/04 SE Number of Words: 375 Number of Characters: 3018 |
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