To overview |
|
| | |||
| Starlith® 1400 |
| High-resolution Lithography Lenses Delivered | Downloads and Links | ||
| Carl Zeiss SMT AG has delivered Starlith® 1400 lenses to partner ASML. With a numeric aperture of 0.93 and resolutions of 65nm and lower, this line establishes new standards in 193nm lithography. | RTF Documents
english (19 KB)Further Information | ||
| Oberkochen, 10.11.2004. The trend towards increasing miniaturization of microchips is continuing. Carl Zeiss SMT AG (Oberkochen) has already delivered lithography lenses from the newly developed Starlith® 1400 line to partner ASML (Veldhoven). These lenses enable the fabrication of microchips with structure widths of 65 nm and below (approximately 1/1000 the diameter of a human hair) – which means a size reduction of almost 10 percent over leading systems. The lenses will be utilized in the Twinscan XT: 1400 systems produced by ASML. The increased resolution permits more cost effective volume production of microchips as they require less space and hence significantly increase productivity. Furthermore, miniaturization of chip features delivers improved chip performance, i.e. higher clock frequency and more functionality. Volume production at a resolution of 65nm is made possible by the unique lens numerical aperture (NA) of 0.93 (variable from 0.65 – 0.93) and the perfect image quality of the lens. ASML and customer companies have been impressed by initial tests that demonstrated 55nm resolution capability during integration of the lens in the scanner system. Dr. Hermann Gerlinger, President and CEO of Carl Zeiss SMT AG stated: “This ensures a further increase in the technological advantage enjoyed by ASML and Carl Zeiss SMT in the 193nm exposure wavelength.” Carl Zeiss SMT now sets its sights on developing the Starlith® 1400i lens for immersion lithography. Delivery to ASML is expected at the beginning of 2005. The lens will deliver significantly higher depth of focus at the same aperture and resolution, relaxing many process parameters in lithography. This will help chipmakers to increase yields. Markus Wiederspahn Service-Center, Press Office Phone: +49 7364 20-2194 Fax: +49 7364 20-4485 E-Mail: wiederspahn@zeiss.de Number: 110/04 SE Number of Words: 296 Number of Signs: 1948 |
|
