2004
The fiscal year 2003/2004 (October to September) closes with total revenues of more than 540 Mio € - so far one of the most successful years for Carl Zeiss SMT.
2004
NTS receives the "Best Product Awards" for its Crossbeam® 1540 XB from the magazine. In 2005 Crossbeam 1540 XB also receives the "IC Industry Award" from the magazine EuroAsia in the category "Yield Management".
2004
Renaming of LEO into Carl Zeiss NTS (for Nano Technology Systems).
2004
NaWoTec receives the German Innovation Award for ist MeRiT™ mask repair system, jointly developed with LEO Electron Microscopy. Only afew months later, SMT acquires NaWoTec, which becomes part of the SMS division.
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