1977
First wafer stepper (GCA) with Zeiss optics. Carl Zeiss optics are used for projection and illumination.
1968
First printer (Telefunken) with optics from the Carl Zeiss Photo Division.
1960
Copying lenses from the Carl Zeiss Photo Division are used for a new application: the miniaturization of integrated circuits for semiconductor devices, marking the birth of today’s Carl Zeiss SMT AG.
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2007
2006
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2004
2000 - 2003
1990 - 1999
1980 - 1989
1960 -1979
Awards |