1989
Semiconductor Technology acquires the status of a division at Carl Zeiss.
1985
ASML emerges from the Philips Semiconductor Technology Division, heralding the beginning of the extremely successful partnership between Carl Zeiss and ASML.
 ASML
1983
First projection and illumination optics for Philips/ASML. |  2008
2007
2006
2005
2004
2000 - 2003
1990 - 1999
1980 - 1989
1960 - 1979
Awards |