Lithographic Systems
Areas of Focus
Optics for EUV-Lithography
Optics for 193 nm
Optics for 193 nm Immersion Lithography
Optics for 248 nm
Optics for 365 nm
Principles: Steppers & Scanners
Overview
Faster and more reliable; more powerful, but more economical. Those are the constant and always new demands on microchips – for as long as the semiconductor industry has existed. Our optical systems have been a key element in the fabrication and miniaturization of chips for more than 40 years. They pave the way for chip manufacturers around the globe, enabling more innovative chip designs and higher productivity.

These optics feature in the wafersteppers and scanners from our Dutch partner and systemintegrator ASML as well as in the microsteppers from Exitech.
More Information
Milestone for new production technology for microchips reached.
Carl Zeiss SMT ships EUV Optics for World’s First, 0.25 NA, Full Field EUV Alpha Tool by ASML