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| Overview |
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Faster and more reliable; more powerful, but more economical. Those are the constant and always new demands on microchips — for as long as the semiconductor industry has existed. Our optical systems have been a key element in the fabrication and miniaturi- zation of chips for more than 40 years. They pave the way for chip manufacturers around the globe, enabling more innovative chip designs and higher productivity.
These optics feature in the wafer- steppers and scanners from our Dutch partner and system- integrator ASML as well as in the microsteppers from Exitech. |
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