Carl Zeiss SMT GmbH originated from the Semiconductor Technology Business Unit of Carl Zeiss AG.
Carl Zeiss SMT and its four strategic business units Lithography Optics, Laser Optics, Nano Technology Systems and Semiconductor Metrology Systems focus their operations on two main markets:
Lithography Imaging Solutions:
- illumination and projection systems for ASML wafer steppers and scanners
- components and modules for Cymer lithography lasers
Process Control Solutions:
- Scanning and transmission electron beam and ion beam systems for nanotechnology applications, life sciences, material analysis and semiconductor applications
- Mask inspection & repair tools
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