2005
The catadioptric lithographylens Starlith® 1700i for microchip production ist the first system worldwide of its kind with a combination of lenses and mirrors. The Numerical Aperture (NA) reaches 1.2 – by far the highest NA in the market. This enables a resolution of 45 nanometers in series production of microchips.
2005
Together with its customer and partner Cymer Inc. Laser Optics division launches a joint venture, TCZ (for Team Cymer Zeiss) and enters the flat panel display market. TCZ develops and markets tools for crystallization of Silicon layers on FPD´s. This project receives the Carl Zeiss internal “Innovation Award” within the category ”High Risc Project”.
 TCZ
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2007
2006
2005
2004
2000 - 2003
1990 - 1999
1980 - 1989
1960 - 1979
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