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The SMT Story 2006 Historical Overview
Today's Carl Zeiss SMT AG has its roots in the copying technology used to miniaturize integrated circuit designs in the 1960s. This business was originally part of the Carl Zeiss Photo Division.

October 2006

Completion: After just under six years of construction work, spread up over three phases, the world's most modern development and production center for lithography optics, the new building of Carl Zeiss SMT, has been officially inaugurated in Oberkochen (about 70 km to the east of Stuttgart).

Photo: Dr. Hermann Gerlinger, Member of the Executive Board of Carl Zeiss AG and President & CEO of Carl Zeiss SMT AG, Eric Meurice, President & CEO of  ASML, Guenther H. Oettinger, Minister President of the German state of Baden-Wuerttemberg and Dr. Dieter Kurz, President & CEO of Carl Zeiss AG

The highlight of the event was the presentation of a new lithography lens for the exposure wavelength 193 nm (from the left in the photo: Dr. Hermann Gerlinger, Member of the Executive Board of Carl Zeiss AG and President & CEO of Carl Zeiss SMT AG, Eric Meurice, President & CEO of ASML, Guenther H. Oettinger, Minister President of the German state of Baden-Wuerttemberg and Dr. Dieter Kurz, President & CEO of Carl Zeiss AG).

Photo: View of the new building of Carl Zeiss SMT. The office building can be seen on the front left, the production halls in the background.
View of the new building of Carl Zeiss SMT. The office building can be seen on the front left, the production halls in the background.

Read More:
Press Release from October 16, 2006


July 2006
Carl Zeiss SMT acquires 100% of the shares of ALIS Corporation (Peabody, MA), the developer of Helium-Ion-Microscopy.

Logo: ALIS - The Power of Resolution

ALIS - The Power of Resolution

Read More:
Press Release from July 19, 2006


March 2006
In March 2006, Nano Technology Systems division and the japanese company SII NanoTechnology (a subsidiary of Seiko Instruments) agree on a global strategic alliance. Mutual sales of the joint product portfolio in appointed territories and joint product development take center stage. Already in summer 2006 the introduction of two jointly developed systems can be presented to the market and underline the vibrancy of this alliance.

NVision 40
NVision 40: The new member of the CrossBeam family, a joint development of Carl Zeiss SMT´s Nano Technology Systems division and SII NanoTechnology


March 16, 2006. Mutual congratulations to the cooperation agreement.

Read more:
Press Release from March 16, 2006


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Awards

Events in 2006:
Completion: SMT Building
Acquisition: ALIS Corporation
Strategic Alliance