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|  SEMI Award
Winfried Kaiser receives European SEMI Award 2006
EUV Lithography takes next step
POBox for ASML´s Alpha Demo Tool shipped
 ASML
Cutting-edge wafer steppers and scanners for chip fabrication
Cymer Inc.
Worldwide market leader in the area of excimer lasers for chip fabrication |
| Carl Zeiss SMT AG provides a broad range of products and solutions that support the global chip industry. Key products are lithography optics for wafer steppers/scanners from ASML.
Our product range additionally comprises optical components and subsystems for lithography lasers from Cymer as well as Synchroton Optics. Furthermore, SMT offers unique mask review and e-beam based mask repair systems.
Based on our expertise in electron beam and particle beam systems we develop and manufacture innovative and flexible failure analysis and material development tools for the chip industry. |