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| Carl Zeiss SMT provides a broad range of products and solutions that support the global chip industry. Key products are lithography optics for wafer steppers/ scanners from ASML.
Our product range additionally comprises optical components and subsystems for lithography lasers as well as Synchroton Optics. Furthermore, SMT offers unique mask review and e-beam based mask repair systems.
Based on our expertise in electron beam and particle beam systems we develop and manufacture innovative and flexible failure analysis and material development tools for the chip industry. |