| | Management Board |
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 | | Dr. rer. nat. Hermann Gerlinger
Member of the Executive Board Carl Zeiss AG and CEO Carl Zeiss SMT GmbH
Physicist (Diploma), University of Würzburg
Dr. rer.nat. of Physics, University of Würzburg |
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 |  | Dr. rer. nat. Andreas Dorsel
Member of the Board Carl Zeiss SMT GmbH and General Manager Lithography Optics
Physicist (Diploma), Ludwig-Maximilians-University of Munich
Dr. rer. nat. of Physics, Ludwig-Maximilians-University of Munich |
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 |  | Justus Felix Wehmer
Member of the Board Carl Zeiss SMT GmbH
Diploma in Business Administration VWA, Academy for Administration and Business (VWA) Essen
Master of Business Administration (MBA), London Business School |
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